D ec 1 99 8 Charged impurity scattering limited low temperature resistivity of low density silicon inversion layers

نویسندگان

  • S. Das Sarma
  • E. H. Hwang
چکیده

We calculate within the Boltzmann equation approach the charged impurity scattering limited low temperature electronic resistivity of low density n-type inversion layers in Si MOSFET structures. We find a rather sharp quantum to classical crossover in the transport behavior in the 0 − 5K temperature range, with the low density, low temperature mobility showing a strikingly strong non-monotonic temperature dependence, which may qualitatively explain the recently observed anomalously strong temperature dependent resistivity in low-density, high-mobility MOSFETs.

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تاریخ انتشار 1998